| タイトル | Multiple-sample holder for IC testing |
| 著者（英） | Haack, R. F. |
| 著者所属（英） | Jet Propulsion Lab., California Inst. of Tech. |
| 発行日 | 1979-03-01 |
| 言語 | eng |
| 内容記述 | Carrousel tray speeds up testing process by feeding mass spectrometer up to 12 sealed integrated circuit packages in rapid succession for analysis of contaminants and total gas composition. |
| NASA分類 | MECHANICS |
| レポートNO | 78B10540
NPO-14314 |
| 権利 | No Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/435631 |
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