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タイトルPhysical properties of thin-film field emission cathodes with molybdenum cones
著者(英)Humphrey, L.; Westerberg, E. R.; Spindt, C. A.; Brodie, I.
著者所属(英)Stanford Research Inst.
発行日1976-12-01
言語eng
内容記述Field emission cathodes fabricated using thin-film techniques and electron beam microlithography are described, together with effects obtained by varying the fabrication parameters. The emission originates from the tip of molybdenum cones that are about 1.5 micron tall with a tip radius around 500 A. Such cathodes have been produced in closely packed arrays containing 100 and 5000 cones as well as singly. Maximum currents in the range 50-150 microamp per cone can be drawn. Life tests with the 100-cone arrays drawing 2 mA total emission (or 3 A per sq cm) have proceeded in excess of 7000 hr with about a 10% drop in emission current. Studies are presented of the emission characteristics and current fluctuation phenomena. It is tentatively concluded that the emission arises from only one or a few atomic sites on the cone tips.
NASA分類ELECTRONICS AND ELECTRICAL ENGINEERING
レポートNO77A16607
権利Copyright
URIhttps://repository.exst.jaxa.jp/dspace/handle/a-is/439847


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