| タイトル | Auger electron spectroscopy at high spatial resolution and nA primary beam currents |
| 著者（英） | Bales, M.; Moorhead, D.; Todd, G.; Poppa, H. |
| 発行日 | 1975-08-01 |
| 言語 | eng |
| 内容記述 | An experimental Auger microprobe system is described which incorporates a field-emission electron gun and total beam currents in the nanoampere range. The distinguishing characteristics of this system include a large multistation UHV specimen chamber, pulse counting and fully digital Auger signal-processing techniques, and digital referencing methods to eliminate the effects of beam instabilities. Some preliminary results obtained with this system are described, and it is concluded that field-emission electron sources can be used for high-resolution Auger electron spectroscopy with primary-beam spots of less than 100 nm and beam currents of the order of 1 nA. |
| NASA分類 | INSTRUMENTATION AND PHOTOGRAPHY |
| レポートNO | 75A38960 |
| 権利 | Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/447321 |
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