| タイトル | Spherical drilling - A new method for the measurement of junction depths in semiconductor devices. |
| 著者（英） | Lagnado, I.; Polcari, S. M. |
| 発行日 | 1967-12-01 |
| 言語 | eng |
| 内容記述 | Junction depths measurement in semiconductor devices by drilling with rotating sphere |
| NASA分類 | ELECTRONIC EQUIPMENT |
| レポートNO | 68A13746 |
| 権利 | Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/484718 |
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