タイトル | Microminiature gas chromatographic column |
本文(外部サイト) | http://hdl.handle.net/2060/19720000305 |
著者(英) | Donaldson, R. W., Jr. |
著者所属(英) | NASA Ames Research Center |
発行日 | 1972-09-01 |
言語 | eng |
内容記述 | Techniques commonly used for fabrication of integrated circuits are utilized to produce long capillary tubes for microminiature chromatographs. Method involves bonding of flat silicon plate to top of spirally grooved silicon chip to close groove and form capillary column. |
NASA分類 | MATERIALS |
レポートNO | 72B10306 ARC-10594 |
権利 | No Copyright |
URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/500867 |