タイトル | Concept for improved vacuum pressure measuring device |
本文(外部サイト) | http://hdl.handle.net/2060/19690000413 |
著者(英) | Medved, D. B. |
発行日 | 1969-09-01 |
言語 | eng |
内容記述 | To measure vacuum pressures in the range of 5 times 10 to the minus 7 to 5 times 10 to the minus 16, a semiconductor resistor composed of sintered zinc oxide is used. Through the effect of surface absorbed gases on the resistance of the semiconductor material, very low pressures are measured. |
NASA分類 | PHYSICAL SCIENCES |
レポートNO | 69B10421 MFS-20172 |
権利 | No Copyright |
URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/502572 |
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