| タイトル | Heterodyne Interferometer Angle Metrology |
| 本文（外部サイト） | http://hdl.handle.net/2060/20100036546 |
| 著者（英） | Weilert, Mark A.; Goullioud, Renaud; Wang, Xu; Hahn, Inseob |
| 著者所属（英） | California Inst. of Tech. |
| 発行日 | 2010-10-01 |
| 言語 | eng |
| 内容記述 | A compact, high-resolution angle measurement instrument has been developed that is based on a heterodyne interferometer. The common-path heterodyne interferometer metrology is used to measure displacements of a reflective target surface. In the interferometer setup, an optical mask is used to sample the measurement laser beam reflecting back from a target surface. Angular rotations, around two orthogonal axes in a plane perpendicular to the measurement- beam propagation direction, are determined simultaneously from the relative displacement measurement of the target surface. The device is used in a tracking telescope system where pitch and yaw measurements of a flat mirror were simultaneously performed with a sensitivity of 0.1 nrad, per second, and a measuring range of 0.15 mrad at a working distance of an order of a meter. The nonlinearity of the device is also measured less than one percent over the measurement range. |
| NASA分類 | Instrumentation and Photography |
| レポートNO | NPO-47179 |
| 権利 | Copyright, Distribution as joint owner in the copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/505916 |
