タイトル | Low-Dead-Volume Inlet for Vacuum Chamber |
本文(外部サイト) | http://hdl.handle.net/2060/20100019611 |
著者(英) | Naylor, Guy; Arkin, C. |
著者所属(英) | ASRC Aerospace Corp. |
発行日 | 2010-05-01 |
言語 | eng |
内容記述 | Gas introduction from near-ambient pressures to high vacuum traditionally is accomplished either by multi-stage differential pumping that allows for very rapid response, or by a capillary method that allows for a simple, single-stage introduction, but which often has a delayed response. Another means to introduce the gas sample is to use the multi-stage design with only a single stage. This is accomplished by using a very small conductance limit. The problem with this method is that a small conductance limit will amplify issues associated with dead -volume. As a result, a high -vacuum gas inlet was developed with low dead -volume, allowing the use of a very low conductance limit interface. Gas flows through the ConFlat flange at a relatively high flow rate at orders of magnitude greater than through the conductance limit. The small flow goes through a conductance limit that is a double-sided ConFlat. |
NASA分類 | Man/System Technology and Life Support |
レポートNO | KSC-13317 |
権利 | Copyright, Distribution as joint owner in the copyright |
URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/507110 |
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