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タイトルLightweight optical mirrors formed in single crystal substrate
本文(外部サイト)http://hdl.handle.net/2060/20080008627
著者(英)Bly, Vincent T.
著者所属(英)NASA Headquarters
発行日2006-12-05
言語eng
内容記述This invention is directed to a process for manufacturing a lightweight mirror from a single crystal material, such as single crystal silicon. As a near perfect single crystal material, single crystal silicon has much lower internal stress than a conventional material. This means much less distortion of the optical surface during the light weighting process. After being ground and polished, a single crystal silicon mirror is light weighted by removing material from the back side using ultrasonic machining. After the light weighting process, the single crystal silicon mirror may be used as-is or further figured by conventional polishing or ion milling, depending on the application and the operating wavelength.
NASA分類Optics
権利No Copyright


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