| タイトル | Process for the production of ultrahigh purity silane with recycle from separation columns |
| 本文（外部サイト） | http://hdl.handle.net/2060/20080007375 |
| 著者（英） | Coleman, Larry M. |
| 著者所属（英） | Union Carbide Corp. |
| 発行日 | 1982-07-20 |
| 言語 | eng |
| 内容記述 | Tri- and dichlorosilanes formed by hydrogenation in the course of the reaction of metallurgical silicon, hydrogen and recycle silicon tetrachloride are employed as feed into a separation column arrangement of sequential separation columns and redistribution reactors which processes the feed into ultrahigh purity silane and recycle silicon tetrachloride. A slip stream is removed from the bottom of two sequential columns and added to the recycle silicon tetrachloride process stream causing impurities in the slip streams to be subjected to reactions in the hydrogenation step whereby waste materials can be formed and readily separated. |
| NASA分類 | Inorganic, Organic and Physical Chemistry |
| 権利 | No Copyright |
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