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タイトルUsing a delta-doped CCD to determine the energy of a low-energy particle
本文(外部サイト)http://hdl.handle.net/2060/20080004673
著者(英)Murphy, Gerald B.; Croley, Donald R.; Nikzad, Shouleh
著者所属(英)California Inst. of Tech.
発行日2001-08-21
言語eng
内容記述The back surface of a thinned charged-coupled device (CCD) is treated to eliminate the backside potential well that appears in a conventional thinned CCD during backside illumination. The backside of the CCD includes a delta layer of high-concentration dopant confined to less than one monolayer of the crystal semiconductor. The thinned, delta-doped CCD is used to determine the energy of a very low-energy particle that penetrates less than 1.0 nm into the CCD, such as a proton having energy less than 10 keV.
NASA分類Instrumentation and Photography
権利No Copyright


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