| タイトル | Method for determining the effects of oxygen plasma on a specimen |
| 本文（外部サイト） | http://hdl.handle.net/2060/20080004381 |
| 著者（英） | Whitaker, Ann F. |
| 著者所属（英） | NASA Headquarters |
| 発行日 | 1991-09-03 |
| 言語 | eng |
| 内容記述 | A method for determining the effects of exposure of oxygen plasma on a specimen such as a thin film polymer or thin metals. The method includes providing an apparatus with a chamber having a holder supporting the polymer specimen in a plasma environment provided in the chamber. The chamber is regulated to a predetermined pressure and set temperature prior to the introduction of oxygen plasma therein. The specimen is then subjected to the plasma environment for a predetermined time during which time the temperature of the specimen is sensed and regulated to be maintained at the set temperature. Temperature sensing is accomplished by a probe which senses any changes in bulk sample temperature. Temperature regulation is provided by a thermoelectric module and by a coolant flow tube. |
| NASA分類 | Metals and Metallic Materials |
| 権利 | No Copyright |
