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タイトルDielectric particle injector for material processing
本文(外部サイト)http://hdl.handle.net/2060/20080004304
著者(英)Leung, Philip L.
著者所属(英)California Inst. of Tech.
発行日1992-11-10
言語eng
内容記述A device for use as an electrostatic particle or droplet injector is disclosed which is capable of injecting dielectric particles or droplets. The device operates by first charging the dielectric particles or droplets using ultraviolet light induced photoelectrons from a low work function material plate supporting the dielectric particles or droplets, and then ejecting the charged particles or droplets from the plate by utilizing an electrostatic force. The ejected particles or droplets are mostly negatively charged in the preferred embodiment; however, in an alternate embodiment, an ion source is used instead of ultraviolet light to eject positively charged dielectric particles or droplets.
NASA分類Electronics and Electrical Engineering
権利No Copyright


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