| タイトル | Vacuum vapor deposition |
| 本文（外部サイト） | http://hdl.handle.net/2060/19950016141 |
| 著者（英） | Weeks, Jack L.; Poorman, Richard M. |
| 著者所属（英） | NASA Marshall Space Flight Center |
| 発行日 | 1995-01-10 |
| 言語 | eng |
| 内容記述 | A method and apparatus is described for vapor deposition of a thin metallic film utilizing an ionized gas arc directed onto a source material spaced from a substrate to be coated in a substantial vacuum while providing a pressure differential between the source and the substrate so that, as a portion of the source is vaporized, the vapors are carried to the substrate. The apparatus includes a modified tungsten arc welding torch having a hollow electrode through which a gas, preferably inert, flows and an arc is struck between the electrode and the source. The torch, source, and substrate are confined within a chamber within which a vacuum is drawn. When the arc is struck, a portion of the source is vaporized and the vapors flow rapidly toward the substrate. A reflecting shield is positioned about the torch above the electrode and the source to ensure that the arc is struck between the electrode and the source at startup. The electrode and the source may be confined within a vapor guide housing having a duct opening toward the substrate for directing the vapors onto the substrate. |
| NASA分類 | NONMETALLIC MATERIALS |
| レポートNO | 95N22558 |
| 権利 | No Copyright |
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