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タイトルIntegrated structure vacuum tube
本文(外部サイト)http://hdl.handle.net/2060/19760024277
著者(英)Dimeff, J.; Kerwin, W. J.
著者所属(英)NASA Ames Research Center
発行日1976-08-31
言語eng
内容記述High efficiency, multi-dimensional thin film vacuum tubes suitable for use in high temperature, high radiation environments are described. The tubes are fabricated by placing thin film electrode members in selected arrays on facing interior wall surfaces of an alumina substrate envelope. Cathode members are formed using thin films of triple carbonate. The photoresist used in photolithography aids in activation of the cathodes by carbonizing and reacting with the reduced carbonates when heated in vacuum during forming. The finely powdered triple carbonate is mixed with the photoresist used to delineate the cathode locations in the conventional solid state photolithographic manner. Anode and grid members are formed using thin films of refractory metal. Electron flow in the tubes is between grid elements from cathode to anode as in a conventional three-dimensional tube.
NASA分類ENGINEERING (GENERAL)
レポートNO76N31365
権利No Copyright


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