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タイトルProtective Fullerene (C60) Packaging System for Microelectromechanical Systems Applications
著者(英)Olivas, John D.
著者所属(英)NASA Pasadena Office
発行日2001-08-21
言語eng
内容記述The invention involves a method for locating the probe of a scanning tunneling micrograph a predetermined distance from its conducting surface, and specifically the deposition of a monolayer of fullerene C60 onto the conducting plate. The Fullerene C60 molecule is approximately spherical and a monolayer of fullerene has a thickness of one nanometer. By providing a monolayer of fullerene on the conducting surface and locating the probe on the surface of the monolayer, a distance of one nanometer can be established between the probe tip and the conducting surface.
NASA分類Electronics and Electrical Engineering
権利No Copyright
URIhttps://repository.exst.jaxa.jp/dspace/handle/a-is/538146


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