| タイトル | Integrated Arrays on Silicon at Terahertz Frequencies |
| 著者（英） | Jung, Cecil; Llombert, Nuria; Mehdi, Imran; Lee, Choonsup; Thomas, Bertrand; Lin, Robert; Chattopadhayay, Goutam; Peralta, Alessandro |
| 発行日 | 2011-07-03 |
| 言語 | eng |
| 内容記述 | In this paper we explore various receiver font-end and antenna architecture for use in integrated arrays at terahertz frequencies. Development of wafer-level integrated terahertz receiver front-end by using advanced semiconductor fabrication technologies and use of novel integrated antennas with silicon micromachining are reported. We report novel stacking of micromachined silicon wafers which allows for the 3-dimensional integration of various terahertz receiver components in extremely small packages which easily leads to the development of 2- dimensioanl multi-pixel receiver front-ends in the terahertz frequency range. We also report an integrated micro-lens antenna that goes with the silicon micro-machined front-end. The micro-lens antenna is fed by a waveguide that excites a silicon lens antenna through a leaky-wave or electromagnetic band gap (EBG) resonant cavity. We utilized advanced semiconductor nanofabrication techniques to design, fabricate, and demonstrate a super-compact, low-mass submillimeter-wave heterodyne frontend. When the micro-lens antenna is integrated with the receiver front-end we will be able to assemble integrated heterodyne array receivers for various applications such as multi-pixel high resolution spectrometer and imaging radar at terahertz frequencies. |
| NASA分類 | Communications and Radar |
| 権利 | Copyright |
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