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タイトルSystems and Methods for Fabricating Carbon Nanotube-Based Vacuum Electronic Devices
本文(外部サイト)http://hdl.handle.net/2060/20150014997
著者(英)Manohara, Harish; Del Castillo, Linda Y.; Toda, Risaku; Murthy, Rakesh
著者所属(英)California Inst. of Tech.
発行日2015-07-28
言語eng
内容記述Systems and methods in accordance with embodiments of the invention proficiently produce carbon nanotube-based vacuum electronic devices. In one embodiment a method of fabricating a carbon nanotube-based vacuum electronic device includes: growing carbon nanotubes onto a substrate to form a cathode; assembling a stack that includes the cathode, an anode, and a first layer that includes an alignment slot; disposing a microsphere partially into the alignment slot during the assembling of the stack such that the microsphere protrudes from the alignment slot and can thereby separate the first layer from an adjacent layer; and encasing the stack in a vacuum sealed container.
NASA分類Composite Materials; Electronics and Electrical Engineering
権利No Copyright


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