| タイトル | Flexible Electro-rheological Microvalve (FERV) Based on SU-8 Cantilever Structures and its Application to Microactuators |
| その他のタイトル | Flexible Electro-rheological Microvalve (FERV) Based on SU-8 Cantilever Structures and its Application to Microactuators |
| 参考URL | http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100547806 |
| 著者（日） | 金, 俊完; 吉田, 和弘; 国府田, くみ子; 横田, 眞一 |
| 著者（英） | KIM, Joon-wan; YOSHIDA, KAZUHIRO; KOUDA, Kumiko; YOKOTA, SHINICHI |
| 発行日 | 2007-12-26 |
| 刊行物名 | Proc. The 6th International Symposium on Linear Drives for Industrial Applications (LDIA 2007) |
| 刊行年月日 | 2007-09 |
| 言語 | en |
| 資料種別 | Conference Paper |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/605706 |
