| タイトル | [Development of Nanotechnology for X-Ray Astronomy Instrumentation] |
| 本文（外部サイト） | http://hdl.handle.net/2060/20040191314 |
| 著者（英） | Schattenburg, Mark L. |
| 著者所属（英） | Massachusetts Inst. of Tech. |
| 発行日 | 2004-01-01 |
| 言語 | eng |
| 内容記述 | This Research Grant provides support for development of nanotechnology for x-ray astronomy instrumentation. MIT has made significant progress in several development areas. In the last year we have made considerable progress in demonstrating the high-fidelity patterning and replication of x-ray reflection gratings. We developed a process for fabricating blazed gratings in silicon with extremely smooth and sharp sawtooth profiles, and developed a nanoimprint process for replication. We also developed sophisticated new fixturing for holding thin optics during metrology without causing distortion. We developed a new image processing algorithm for our Shack-Hartmann tool that uses Zernike polynomials. This has resulted in much more accurate and repeatable measurements on thin optics. |
| NASA分類 | Astronomy |
| レポートNO | MIT-OSP-6894530 |
| 権利 | No Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/87495 |
