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タイトル水の吸着における光学薄膜特性の評価
その他のタイトルOptical evaluation of the optical thin films of absorbed water
参考URLhttps://opac.time.u-tokai.ac.jp/webopac/TC10001859
著者(日)成田, 彩希; 室谷, 裕志; 奥田, 良; 原田, 敏憲; 杉本, 洋己
著者(英)Narita, Saki; Murotani, Hiroshi; Okuda, Ryo; Harada, Toshiki; Sugimoto, Hiroki
著者所属(日)東海大学; 東海大学; 株式会社ニデック; 株式会社トヤマ; 池上通信機株式会社
著者所属(英)Tokai University; Tokai University; NIDEK CO., LTD.; TOYAMA Co.,Ltd.; IKEGAMI TSUSHINKI CO.,LTD.
発行日2017-03-31
発行機関など東海大学工学部
School of Engineering, Tokai University
刊行物名東海大学紀要: 工学部
Proceedings of the School of Engineering of Tokai University
56
2
開始ページ13
終了ページ20
刊行年月日2017-03-31
言語jpn
eng
抄録Recently, the use of optical thin films as electronic components has increased drastically, and changes in the spectra caused by water adsorption on optical thin films is becoming a major problem. In this study, we investigated the change of the water adsorption properties and the optical characteristics associated with the single layer TiO2 optical film. The spectral shift of films was observed by using a vacuum small chamber. The results showed that moisture adsorption on the TiO2 film was saturated within several seconds and reversibility of the spectral shift of the film was observed. The adsorption of moisture was calculated by using the adsorption isotherm models of IUPAC. As a result, the mechanism of water adsorption is considered to be the same as that in Langmuir adsorption model.
内容記述形態: カラー図版あり
Physical characteristics: Original contains color illustrations
キーワードMoisture adsorption; Spectral shift; Columnar structure
資料種別Departmental Bulletin Paper
NASA分類Electronics and Electrical Engineering
ISSN0563-6787
NCIDAN00157101
SHI-NOAA1740165000
URIhttps://repository.exst.jaxa.jp/dspace/handle/a-is/889799


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