| タイトル | Chemical Gas Sensors for Aeronautics and Space Applications III |
| 本文（外部サイト） | http://hdl.handle.net/2060/20000000447 |
| 著者（英） | Hunter, G. W.; Liu, C. C.; Chen, L. Y.; Jin, Z.; Neudeck, P. G.; Rauch, W. A.; Liu, M.; Wu, Q. H.; Hammond, J.; Sawayda, M. S.; Makel, D.; Hall, G. |
| 著者所属（英） | NASA Glenn Research Center |
| 発行日 | 1999-10-01 |
| 言語 | eng |
| 内容記述 | Aeronautic and space applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. Areas of interest include launch vehicle safety monitoring, emission monitoring, and fire detection. This paper discusses the needs of aeronautic and space applications and the point-contact sensor technology being developed to address these needs. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Sensor development for each application involves its own challenges in the fields of materials science and fabrication technology. The number of dual-use commercial applications of this microfabricated gas sensor technology make this area of sensor development a field of significant interest. |
| NASA分類 | Instrumentation and Photography |
| レポートNO | E-11943
NAS 1.15:209450
NASA/TM-1999-209450 |
| 権利 | No Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/95590 |
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