| タイトル | Microfabricated Chemical Sensors for Safety and Emission Control Applications |
| 本文（外部サイト） | http://hdl.handle.net/2060/19990009743 |
| 著者（英） | Neudeck, P. G.; Hunter, G. W.; Wu, Q. H.; Knight, D.; Liu, C. C.; Chen, L.-Y. |
| 著者所属（英） | NASA Lewis Research Center |
| 発行日 | 1998-11-01 |
| 言語 | eng |
| 内容記述 | Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication (MicroElectroMechanical Systems (MEMS)-based) technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications. |
| NASA分類 | Instrumentation and Photography |
| レポートNO | NAS 1.15: 208816
E-11418
NASA/TM-1998-208816 |
| 権利 | No Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/97021 |
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